Hot-Carrier Effects in MOS Devices

by Takeda; Yang; Miura-Hamada
Format: Hardcover
Pub. Date: 1995-11-20
Publisher(s): Elsevier Science
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Summary

The exploding number of uses for ultrafast, ultrasmall integrated circuits has increased the importance of hot-carrier effects in manufacturing as well as for other technological applications. They are rapidly movingout of the research lab and into the real world. This book is derived from Dr. Takedas book in Japanese, Hot-Carrier Effects, (published in 1987 by Nikkei Business Publishers). However, the new book is much more than a translation. Takedas original work was a starting point for developing this much more complete and fundamental text on this increasingly important topic. The new work encompasses not only all the latest research and discoveries made in the fast-paced area of hot carriers, but also includes the basics of MOS devices, and the practical considerations related to hot carriers.

Author Biography

Eiji Takeda: Hitachi Ltd., Tokyo, Japan Cary Y. Yang: Santa Clara University, California Akemi Miura-Hamada: Hitachi Ltd., Tokyo, Japan

Table of Contents

Prefacep. xi
MOS Device Fundamentals
From Discrete to ULSIp. 1
Physics of the MOS Diodep. 2
The Ideal MOS Diodep. 3
Energy Band Diagramsp. 3
Solution with the Depletion Approximationp. 5
Capacitance-Voltage Characteristicsp. 8
General Solutionp. 11
Nonideal Considerationsp. 15
Voltage-Independent Flat-Band Shiftsp. 15
Interface Trapped Chargep. 17
Nonuniform Substrate Dopingp. 22
Principles of the MOSFETp. 23
Qualitative Description of MOSFET Operationp. 23
Bulk Charge Modelp. 26
The Square Lawp. 28
Threshold Voltagep. 29
Transconductancep. 30
Threshold Voltage Determinationp. 31
Subthreshold Conductionp. 32
Short-Channel Effectsp. 34
Mobility Degradationp. 35
Carrier Velocity Saturationp. 37
Survey of Device and Circuit Reliability Issues Related to Hot-Carrier Effectsp. 40
Summaryp. 42
Hot-Carrier Injection Mechanisms
Introductionp. 43
Avalanche Breakdownp. 44
Avalanche Multiplicationp. 45
Normal Breakdownp. 47
Negative-Resistance Breakdownp. 48
Hot-Carrier Injection Mechanisms and Gate Currentsp. 49
Channel Hot-Electron (CHE) Injectionp. 49
Drain Avalanche Hot-Carrier (DAHC) Injectionp. 51
Secondarily Generated Hot-Electron (SGHE) Injectionp. 51
Substrate Hot-Electron (SHE) Injectionp. 57
Fowler-Nordheim (F-N) Tunnel Injectionp. 57
Direct Tunnel Injectionp. 58
Gate Current Modelingp. 58
Gate Current Resulting from CHE Injection (Effective Electron Temperature Model)p. 58
Gate Current Resulting from DAHC Injectionp. 60
Effective Electron Temperature vs Lucky-Electron Modelp. 65
Summaryp. 65
Hot-Carrier Device Degradation
Introductionp. 66
Device Degradation Due to Various Hot-Carrier Injectionsp. 67
Interface Trap Density (N[subscript it]) vs Degraded Length ([delta]L)p. 68
[Delta]G[subscript m]/G[subscript m0] vs [Delta]N[subscript it]/N[subscript it] Relationp. 70
Role of Hot Holesp. 73
DAHC vs CHE Injectionsp. 76
SGHE vs DAHC Injectionsp. 78
Modeling of Device Degradationp. 80
Substrate Current Modelingp. 80
Device Degradation Modeling--Hot-Carrier Lifetimep. 81
The Si-SiO[subscript 2] Interface Degradationp. 88
Summaryp. 90
AC and Process-Induced Hot-Carrier Effects
Introductionp. 91
Dynamic (AC) Stress Effectsp. 91
Gate Pulse-Induced Noisesp. 92
AC Hot-Carrier Degradation Due to Noisesp. 92
AC Hot-Carrier Effects without Noisesp. 97
Device Structure Dependence of AC Hot-Carrier Effectsp. 98
Initial Stage Degradationp. 103
Process Effects on Hot-Carrier Degradationp. 106
Gate Oxide Degradation Due to Electron-Beam Direct Writingp. 108
Isolation Effects on Hot-Carrier Degradationp. 110
Materials Effects on Hot-Carrier Degradationp. 110
Mechanical Stress Effectp. 113
High-Quality Gate Dielectricsp. 120
Summaryp. 121
Hot-Carrier Effects at Low Temperature and Low Voltage
Introductionp. 122
Hot-Carrier Effects at Low Temperaturep. 123
Device Performance Degradationp. 123
G[subscript m] Degradationp. 123
V[subscript th] Shiftp. 127
Device Degradation Mechanismsp. 130
Summaryp. 133
Dependence of Hot-Carrier Phenomena on Device Structure
Introductionp. 134
Variations of Device Structurep. 135
Device Parameter Dependencep. 135
Effective Channel Lengthp. 135
Channel Dosep. 135
Gate Oxide Thicknessp. 137
Gate to Drain-Source Overlapped Lengthp. 138
Device Structure Dependencep. 140
Drain Structuresp. 140
Hot-Carrier-Resistant Characteristics (I[subscript SUB], I[subscript G])p. 142
Summaryp. 145
As-P Double Diffused Drain (DDD) Versus Lightly Doped Drain (LDD) Devices
Introductionp. 147
DDD Structure and Its Fabrication Processp. 149
DDD Device Characteristicsp. 150
I[subscript D]-V[subscript D] Characteristicsp. 150
Drain Sustaining Voltage (BV[subscript DS])p. 153
Short-Channel Effects--V[subscript th] Loweringp. 153
Tail Coefficient and V[subscript th] Scatteringp. 154
Hot-Carrier Breakdown Voltage or Highest Applicable Voltage (BV[subscript DC])p. 157
DDD and LDD Device Operation Principlesp. 159
LDD Device Characteristicsp. 161
Device Characteristics Specific to LDD Devicesp. 161
Reduced Switchback Action Due to Source n[superscript -] Resistancep. 162
Improved LDD Devicesp. 165
Gaussian vs Abrupt Junctionsp. 166
V[subscript th] Loweringp. 166
G[subscript m] vs x[subscript j] Relationp. 168
Summaryp. 172
Gate-to-Drain Overlapped Devices (GOLD)
Introductionp. 175
GOLD Structure and Its Fabrication Processp. 176
Device Characteristicsp. 177
G[subscript m] Improvementp. 177
Suppressed Avalanche-Induced Breakdownp. 178
Table of Contents provided by Syndetics. All Rights Reserved.

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